A novel sequential engagement electrodes for vertical comb-drive actuator

This work demonstrated the concept of using "sequential engagement of comb electrodes" to improve the linearity and maximum deflection of vertical comb-drive actuator (VCA). This concept is achieved by varying the in-plane distribution of comb electrodes. The simulation and experiment results of VCA with four different electrode-distribution designs demonstrated the feasibility of this study. In comparison, a modified (Reverse curve-distribution) VCA was remarkably improved the performance of conventional (Linear-distribution) VCA. Experiments show that the Reverse curve-distribution VCA improves the nonlinearity for 50% and increases the maximum angular motion for 3.5-fold.