Noise Analysis of MEMS Gyroscope under Force Rebalance Closed Loop Detection

被引：0
|
作者：
Bu, Feng [1 ]
Fan, Bo [1 ]
Guo, Shuwen [1 ]
Xu, Dacheng [1 ]
Zhao, Heming [1 ]
机构：
[1] Soochow Univ, Sch Elect & Informat Engn, Suzhou 215006, Peoples R China
来源：
ELEVENTH INTERNATIONAL CONFERENCE ON SIGNAL PROCESSING SYSTEMS | 2019年 / 11384卷
关键词：
MEMS gyroscope; noise model; force-to-rebalance closed-loop detection; noise equivalent rate;
D O I：
10.1117/12.2559706
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Angle Random Walk (ARW) is an important performance index of the MEMS gyroscope, which is determined by the noise in the control system. In this paper, the thermal noise of gyroscope, the noise of pickoff circuit and feedback circuit are considered, and the noise model of control system is constructed under force-to-rebalance (FTR) closed-loop detection. The influence of system parameters on the power spectral density (PSD) of noise equivalent rate (NER) is analyzed, and the noise is reduced by adjusting system parameters reasonably. Simulink numerical simulation proves the correctness of the noise model.
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页数：6
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