Dust removal system using static electricity

被引：7

作者：

Onozuka, M ^{[1
]}

Ueda, Y ^{[1
]}

Takahashi, K ^{[1
]}

Seki, Y ^{[1
]}

Ueda, S ^{[1
]}

Aoki, I ^{[1
]}

机构：

[1] JAPAN ATOM ENERGY RES INST,NAKA,IBARAKI 31911,JAPAN

来源：

VACUUM | 1996年 / 47卷 / 6-8期

关键词：

dust; dust removal; electric curtain; electrostatic force; static electricity;

D O I：

10.1016/0042-207X(96)00016-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Development of a dust removal system using static electricity has been conducted. It is envisioned that the system can collect and transport dust under vacuum. In the system the dust is charged by dielectric polarization and floated by an electrostatic attraction force that is generated by a de electric field. The dust is then transported by the electric curtain formed by a three-phase ac electric field. Experimental investigation has been initiated to examine the characteristics of the system. It was found that carbon and copper particles measuring 5-44 mu m were successfully removed from the bottom of the chamber under a vacuum environment. Copyright (C) 1996 Published by Elsevier Science Ltd.

引用

页码：541 / 544

页数：4

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