Titania nanostructure arrays from lithographically defined templates

We report the fabrication of TiO(2) nanostructures with lithographically defined templates. Interferomeric-lithography was used to define soft templates (polymer posts), and a sol-gel solution was deposited on a patterned surface. In the final step, calcination was employed to form uniform low aspect-ratio crystalline nonclose-packed TiO(2) nanotube arrays over a large area. Similarly, nanotree arrays and parallel nanotunnels were prepared as well. The position and morphology of TiO(2) nanostructures were well controlled. These TiO(2) nanostructures have a potential technological importance in clean energy, biosensor, and drug release. (C) 2010 American Institute of Physics. [doi:10.1063/1.3521462]