Robust characteristics of semiconductor-substrate temperature measurement by autocorrelation-type frequency-domain low-coherence interferometry

被引：10
|
作者：
Tsutsumi, Takayoshi [1 ]
Ohta, Takayuki [2 ]
Ishikawa, Kenji [1 ]
Takeda, Keigo [1 ]
Kondo, Hiroki [1 ]
Sekine, Makoto [1 ]
Hori, Masaru [1 ]
Ito, Masafumi [2 ]
机构：
[1] Nagoya Univ, Grad Sch Engn, Dept Elect Engn & Comp Sci, Nagoya, Aichi 4648603, Japan
[2] Meijo Univ, Fac Sci & Technol, Dept Elect & Elect Engn, Nagoya, Aichi 4688502, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2015年 / 54卷 / 01期
关键词：
RECOMBINATION; NONCONTACT; SURFACE; THERMOMETRY; RADICALS; ATOMS;
D O I：
10.7567/JJAP.54.01AB03
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We have compared in detail the robust characteristics of an autocorrelation-type frequency-domain low-coherence interferometry (ACT-FD-LCI) system without a reference mirror with those of the conventional frequency-domain low-coherence interferometry (FD-LCI) system with a reference mirror. The standard deviation of temperature measurement was less than 0.04 degrees C at temperatures below 550 degrees C for a typical thickness of 480 mu m, as determined from the measured optical path length. The robustness of performance against disturbances has been markedly improved, as compared with a precision of 0.28 degrees C in the conventional FD-LCI system with the reference mirror. In particular, we have confirmed that the ACT-FD-LCI system has a large tolerance to disturbances due to dispersion and changes in the polarization of the signal light owing to the removal of the reference mirror. (C) 2015 The Japan Society of Applied Physics
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页数：5
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