Hydrogen incorporation in ultrananocrystalline diamond/amorphous carbon films

被引：36
|
作者：
Kulisch, W. [1 ]
Sasaki, T. [1 ]
Rossi, F. [1 ]
Popov, C. [2 ]
Sippel, C. [2 ]
Grambole, D. [3 ]
机构：
[1] Commiss European Communities, Joint Res Ctr, Inst Hlth & Consumer Protect, I-21020 Ispra, VA, Italy
[2] Univ Kassel, Inst Nanostruct Technol & Analyt, D-34121 Kassel, Germany
[3] Forschungszentrum Dresden Rossendorf, Inst Ion Beam Phys & Mat Res, D-01314 Dresden, Germany
来源：
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS | 2008年 / 2卷 / 02期
关键词：
D O I：
10.1002/pssr.200701305
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The incorporation of hydrogen within ultrananocrystalline diamond/amorphous carbon composite films has been investigated by nuclear reaction analysis (NRA) and Fourier transform infrared spectroscopy (FTIR). The film bulk contains ca. 7.5-8% H (for a deposition temperature of 600 degrees C, while the H concentration in the surface region is considerably higher. FTIR measurements show that the hydrogen-rich surface is formed right at the beginning of the deposition process and grows outward as the film thickness increases. It can thus be concluded that surface hydrogen species play an active role in the formation of ultrananocrystalline diamond/amorphous carbon films. (c) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
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页码：77 / 79
页数：3
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