Using surface chemistry to control the performance of micromechanical silicon resonators.

被引：0
|
作者：
Hines, MA [1 ]
Wang, Y [1 ]
Henry, JA [1 ]
机构：
[1] Cornell Univ, Baker Lab, Dept Chem, Ithaca, NY 14853 USA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2003年 / 226卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
002-COLL
引用
收藏
页码：U348 / U348
页数：1
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