Study of Nd(Zn0.5Ti0.5)O3 Dielectric Thin Films Fabricated Using Sol-Gel Method

被引：0

作者：

Tseng, Ching-Fang ^{[1
]}

Huang, Bo-Yan ^{[1
]}

Hsu, Cheng-Hsing ^{[2
]}

机构：

[1] Natl United Univ, Dept Elect Engn, 2 Lien Da,Nan Shih Li, Miaoli 36063, Taiwan

[2] Natl United Univ, Dept Elect Engn, 2 Lien Da,Nan Shih Li, Miaoli 36063, Taiwan

来源：

SENSORS AND MATERIALS | 2022年 / 34卷 / 09期

关键词：

sol-gel method; Nd(Zn0.5Ti0.5)O-3 thin film; microstructure; electrical properties; CERAMICS;

D O I：

10.18494/SAM4041

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We investigated the microstructures and electrical properties of Nd(Zn0.5Ti0.5)O-3 thin films fabricated using the sol-gel method at various preheating temperatures and annealing temperatures. The composites and their morphological characteristics were analyzed using X-ray diffraction (XRD) and scanning electron microscopy (SEM) and were found to be sensitive to both the preheating temperature (100-300 degrees C) and annealing temperature (600-800 degrees C). The diffraction pattern indicated that the deposited films exhibit a polycrystalline microstructure. The dielectric constant and leakage current density of the Nd(Zn0.5Ti0.5)O-3 thin films at a preheating temperature of 300 degrees C and an annealing temperature of 700 degrees C were 16 and 2.13 x 10(-8), respectively. The experimental data for Nd(Zn0.5Ti0.5)O-3 thin films can be applied to wireless communication microwave components, such as temperature-sensing antennas.

引用

页码：3561 / 3567

页数：7

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