Enhancement of optical quality factor by thermal annealing of single crystal diamond micro-resonators

被引：0
|
作者：
Graziosi, Teodoro [1 ]
Mi, Sichen [1 ]
Kiss, Marcell [1 ]
Quack, Niels [1 ]
机构：
[1] Ecole Polytech Fed Lausanne, Lausanne, Switzerland
来源：
2018 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2018年
基金：
瑞士国家科学基金会;
关键词：
single crystal diamond; micro-disk; resonator; focused ion beam; annealing;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report on the increase in optical quality factor of a suspended single crystal diamond micro-disk resonator by thermal annealing. The resonators are fabricated by Deep Reactive Ion Etching (DRIE) to obtain circular pillars in bulk single crystal diamond, followed by multidirectional Focused Ion Beam (FIB) milling to shape the anchor, thin the micro disk and smooth the sidewalls. Thermal annealing in air at 500 degrees C for 4 h eliminates FIB induced crystal damage yielding optical quality factors of up to 5'700, corresponding to an increase of up to 5x compared to the resonators before annealing.
引用
收藏
页码：20 / 21
页数：2
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