Driving of micromirror and simultaneous detection of rotation angle using integrated piezoresistive sensor

被引：0
|
作者：
Sasaki, Minoru [1 ]
Tabata, Motoki [2 ]
Hane, Kazuhiro [2 ]
机构：
[1] Toyota Technol Inst, Nagoya, Aichi 468, Japan
[2] Tohoku Univ, Sendai, Miyagi, Japan
来源：
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年
关键词：
micromirror; piezoresistive sensor; integration;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A piezoresistive rotation angle sensor is integrated in a micromirror driven by the electrostatic vertical comb drive actuator. The sensor signal is the voltage generated by the shear piezoresistance effect. Driving the electrostatic actuator, the sensor signal is measured. The sensor signal is confirmed to be proportional to the mirror rotation angle. The hysteresis of the sensor signal is found to be less than that observed under the open-control of the micromirror.
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页数：2
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