Single electron charging and discharging phenomena at room temperature in a silicon nanocrystal memory

被引:30
|
作者
Molas, G [1 ]
De Salvo, B [1 ]
Mariolle, D [1 ]
Ghibaudo, G [1 ]
Toffoli, A [1 ]
Buffet, N [1 ]
Deleonibus, S [1 ]
机构
[1] CEA, LETI, F-38054 Grenoble 9, France
关键词
D O I
10.1016/S0038-1101(03)00177-1
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, we present a silicon nanocrystal memory showing single electron charging/discharging phenomena at room temperature. A clear staircase behavior in the drain current characteristic, measured as a function of the gate voltage and of time, is observed, where each step corresponds to the capture/emission of one electron in a silicon dot over the channel. A simple model, which allows for the evaluation of the average charging/discharging time in a silicon dot and for the impact of a charged silicon dot over the channel, is finally proposed. (C) 2003 Elsevier Ltd. All rights reserved.
引用
收藏
页码:1645 / 1649
页数:5
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