Hypersonic aerodynamics measurement with fiber optic balance based on MEMS Fabry-Perot strain sensor

被引：0
|
作者：
Min, Fu [1 ]
Yang, Yanguang [1 ]
Qiu, Huacheng [1 ]
Zhong, Shaolong [2 ]
Pi, Xingcai [1 ]
机构：
[1] China Aerodynam Res & Dev Ctr, Hyperveloc Aerodynam Inst, Mianyang 621000, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
来源：
FIBER OPTIC SENSING AND OPTICAL COMMUNICATION | 2018年 / 10849卷
关键词：
Aerodynamic measurement; fiber optic balance; MEMS; Fabry-Perot; wind tunnel test;
D O I：
10.1117/12.2504150
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In general, conventional resistance strain balances are used to obtain aerodynamics forces in hypersonic wind tunnels. Owing to the advantages of fast response, high sensitivity and anti-electromagnetic interference, fiber optic sensors provide a new technical approach to wind tunnel strain balance. In this paper, a three-component fiber optic balance based on MEMS Fabry-Perot strain sensor has been developed. The MEMS strain sensor based on Fabry-Perot interference was fabricated by surface and bulk MEMS techniques. The MEMS FP strain sensor has a high finesse factor by adapting high-reflection films deposited on the surfaces of FP cavity. The three-component fiber optic balance has been calibrated, and evaluated in a hypersonic low density wind tunnel. The results of static calibration and wind tunnel tests have declared a good performance compared to the results of resistance strain balance.
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页数：8
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