Laser selective thin film structuring with different wavelengths

被引:0
|
作者
Du, Keming [1 ]
Shi, Peng [1 ]
机构
[1] EdgeWave GmbH, D-52146 Wurselen, Germany
关键词
D O I
10.1117/12.877123
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Selective thin film structuring with laser beams was already being deployed in industries such as the display industry and the photovoltaic industry. However developments in tailored performances of laser beams, such as spatial profile, temporal behaviour and wavelength will improve the resource efficiency and reduce the production cost and this in turn will make more applications accessible. For optimizing selective thin film structuring different wavelengths were used. In this paper the results will be presented and discussed.
引用
收藏
页数:6
相关论文
共 50 条
  • [1] Selective structuring of thin-film solar cells by ultrafast laser ablation
    Huber, Heinz P.
    Herrnberger, Frank
    Kery, Stefan
    Zoppel, Sandra
    [J]. COMMERCIAL AND BIOMEDICAL APPLICATIONS OF ULTRAFAST LASERS VIII, 2008, 6881
  • [2] Thin film deposition of boron nitride by femtosecond laser pulses with different wavelengths
    Miyake, H
    Luculescu, C
    Sato, S
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2002, 41 (12): : 7506 - 7507
  • [3] Thin film deposition of boron nitride by femtosecond laser pulses with different wavelengths
    Miyake, Hidekazu
    Luculescu, Catalin
    Sato, Shunichi
    [J]. 1600, Japan Society of Applied Physics (41):
  • [4] Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells
    S. Zoppel
    H. Huber
    G.A. Reider
    [J]. Applied Physics A, 2007, 89 : 161 - 163
  • [5] Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells
    Zoppel, S.
    Huber, H.
    Reider, G. A.
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2007, 89 (01): : 161 - 163
  • [6] Femtosecond Laser Quantized Structuring in thin SiOx Film
    Ho, Stephen
    Domke, Matthias
    Roper, David
    Huber, Heinz P.
    Herman, Peter R.
    [J]. 2016 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2016,
  • [7] Laser structuring of thin-film solar cells on polymers
    Gecys, P.
    Raciukaitis, G.
    Gedvilas, M.
    Selskis, A.
    [J]. EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2009, 46 (01): : 12508p1 - 12508p6
  • [8] Simulation of Laser Structuring of Thin-Film Solar Cells
    Peschel, T.
    Nolte, S.
    Eberhardt, R.
    Tuennermann, A.
    [J]. JOURNAL OF LASER MICRO NANOENGINEERING, 2015, 10 (03): : 284 - 290
  • [9] DIRECT LASER INTERFERENCE ABLATION TECHNIQUE FOR THIN FILM STRUCTURING
    Indrisiunas, S.
    Voisiat, B.
    Gedvilas, M.
    Raciukaitis, G.
    [J]. RADIATION INTERACTION WITH MATERIAL AND ITS USE IN TECHNOLOGIES 2012, 2012, : 444 - 447
  • [10] Micro/Nano-structures Formation on ITO Thin Film Irradiated by Different Femtosecond Laser Wavelengths
    Cheng, C. W.
    Lee, I. M.
    Shen, W. C.
    Lin, C. Y.
    Chen, J. S.
    [J]. JOURNAL OF LASER MICRO NANOENGINEERING, 2010, 5 (03): : 213 - 217