Thermo-optical tunable planar ridge microdisk resonator in silicon-on-insulator

被引：19

作者：

Song, Junfeng ^{[1
,2
]}

Fang, Qing ^{[1
,3
]}

Luo, Xianshu ^{[1
]}

Cai, Hong ^{[1
]}

Liow, T. -Y. ^{[1
]}

Yu, M. -B. ^{[1
]}

Lo, G. -Q. ^{[1
]}

Kwong, D. -L. ^{[1
]}

机构：

[1] ASTAR, Inst Microelect, Singapore 117685, Singapore

[2] Jilin Univ, Coll Elect Sci & Engn, State Key Lab Integrated Optoelect, Changchun 130012, Peoples R China

[3] Chinese Acad Sci, Inst Semicond, Optoelect Syst Lab, Beijing 100083, Peoples R China

来源：

OPTICS EXPRESS | 2011年 / 19卷 / 12期

关键词：

MICROCAVITY; PHOTONICS; CHIP; SOI;

D O I：

10.1364/OE.19.011220

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this work, we design and demonstrate planar ridge microdisk resonators in silicon-on-insulator, which assemble the advantages of microring and microdisk resonators. The dependences of resonator optical modes on the slab thickness and the waveguide-to-resonator coupling gap are investigated. The highest Q-factor obtained is similar to 4 x 10(5). Using the thermo-optical effect, we attain a resonance wavelength tuning efficiency of similar to 66.5 pm/mW. We also compare the transmission spectra measured by using wavelength-scanning method and voltage-scanning method and show potential application for the adopted voltage-scanning method. (C) 2011 Optical Society of America

引用

页码：11220 / 11227

页数：8

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