A Tunable High Performance Microwave Equalizer Based on RF MEMS Switches

The theory, design, fabrication and measurements of a novel tunable equalizer for adjusting the microwave signals based on RF MEMS switches are presented. The novelty of the tunable equalizer is the RF MEMS switches and the thick CPW line with released signal and ground sections based on the MEMS technology. This equalizer adjusts the attenuation curve by the RF MEMS switches and makes the power of the microwave signal flat during the work frequency range. In this method, the equalizer can achieve tunable characteristic, high frequency and good microwave performance. This MEMS equalizer is fabricated by MetalMUMPs process. The experiment results show the MEMS equalizer can adjust two attenuation curves and has low reflection losses, low minimal insertion losses at frequency range from 20GHz similar to 24GHz.