High-speed MEMS swept-wavelength light source for FBG sensor system

被引:7
|
作者
Saitoh, T [1 ]
Nakamura, K [1 ]
Takahashi, Y [1 ]
Miyagi, K [1 ]
机构
[1] ANRITSU Corp, Atsugi, Kanagawa 2438555, Japan
关键词
MEMS; scanning mirror; swept wavelength; light source; laser diode; FBG sensor;
D O I
10.1117/12.623604
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A high-speed MEMS swept-wavelength light source (SLS) for an FBG sensor system is proposed and demonstrated. It is basically a multi-mode external-cavity laser diode (LD), and consists mainly of an LD head, diffraction grating, and electromagnetically actuated MEMS scanning mirror. It has a linewidth of 0.03 nm, scan range from 1508 to 1582 nm, scan rate of 0.57 ms and output power of 10 mW. The heart of the MEMS SLS is the MEMS scanning mirror (8 x 6 mm) that changes the oscillation wavelength continuously and rapidly. The scanning mirror is actuated by electromagnetic force derived from a permalloy piece glued on the back of the mirror and a C-shape electromagnet. The MEMS SLS allows construction of a low-cost, simple and high-speed FBG interrogator system.
引用
收藏
页码:146 / 149
页数:4
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