Low-Temperature Characterization of Cu-Cu:Silica-Based Programmable Metallization Cell

被引:15
|
作者
Chen, W. [1 ]
Chamele, N. [1 ]
Gonzalez-Velo, Y. [1 ]
Barnaby, H. J. [1 ]
Kozicki, M. N. [1 ]
机构
[1] Arizona State Univ, Sch Elect Comp & Energy Engn, Tempe, AZ 85287 USA
关键词
PMC; CBRAM; RRAM; Cu; silica; low temperature; direct tunneling; RANDOM-ACCESS MEMORY;
D O I
10.1109/LED.2017.2734743
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this letter, low-temperature characterization of Cu-Cu:silica programmable metallization cells (PMC) is presented. Our results show that the PMC device is functional even at 4 K and that the low resistance state is essentially unaffected by temperature whereas the high resistance state increases with decreasing temperature. A direct tunneling model is applied to explain the temperature independent low-resistance state.
引用
收藏
页码:1244 / 1247
页数:4
相关论文
共 50 条
  • [1] Low-Temperature Cu-Cu Wafer Bonding
    Rebhan, B.
    Hesser, G.
    Duchoslav, J.
    Dragoi, V.
    Wimplinger, M.
    Hingerl, K.
    SEMICONDUCTOR WAFER BONDING 12: SCIENCE, TECHNOLOGY, AND APPLICATIONS, 2012, 50 (07): : 139 - 149
  • [2] Cu-Cu bonding by low-temperature sintering of self-healable Cu nanoparticles
    Li, Junjie
    Liang, Qi
    Chen, Chen
    Shi, Tielin
    Liao, Guanglan
    Tang, Zirong
    2019 IEEE 69TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2019, : 661 - 666
  • [3] Low-Temperature and Low-Pressure Cu-Cu Bonding by Highly Sinterable Cu Nanoparticle Paste
    Li, Junjie
    Yu, Xing
    Shi, Tielin
    Cheng, Chaoliang
    Fan, Jinhu
    Cheng, Siyi
    Liao, Guanglan
    Tang, Zirong
    NANOSCALE RESEARCH LETTERS, 2017, 12
  • [4] Advancements in Metal Passivation Process for Low-Temperature Cu-Cu Direct Bonding
    Jong-Kyung, Park
    Sang-Woo, Park
    Min-Seong, Jeong
    2023 20TH INTERNATIONAL SOC DESIGN CONFERENCE, ISOCC, 2023, : 223 - 224
  • [5] Investigation of bonding mechanism for low-temperature Cu-Cu bonding with passivation layer
    Hong, Zhong-Jie
    Liu, Demin
    Hu, Han-Wen
    Cho, Chih-, I
    Weng, Ming-Wei
    Liu, Jui-Han
    Chen, Kuan-Neng
    APPLIED SURFACE SCIENCE, 2022, 592
  • [6] Enhanced shear strength and microstructure of Cu-Cu interconnection by low-temperature sintering of Cu nanoparticles
    Cui, Ze
    Jia, Qiang
    Wang, Yishu
    Li, Dan
    Wang, Chien-Ping
    Zhang, Hongqiang
    Lu, Ziyi
    Ma, Limin
    Zou, Guisheng
    Guo, Fu
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2024, 35 (11)
  • [7] Research progress of low-temperature Cu-Cu bonding technology for advanced packaging
    Wang S.
    Zou G.
    Liu L.
    Hanjie Xuebao/Transactions of the China Welding Institution, 2022, 43 (11): : 112 - 125
  • [8] Development of high-performance Cu nanoparticle paste and low-temperature sintering for Cu-Cu bonding
    Huang, Jiaqiang
    Ning, Zhiling
    Yu, Caiping
    Liu, Dongjing
    Liu, Yujie
    Xiao, Dawei
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2025, 36 (09)
  • [9] Effects of forming gas plasma treatment on low-temperature Cu-Cu direct bonding
    Kim, Sungdong
    Nam, Youngju
    Kim, Sarah Eunkyung
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2016, 55 (06)
  • [10] Enhancement of Low-Temperature Cu-Cu Bonding by Metal Alloy Passivation in Ambient Atmosphere
    Hsu, Mu-Ping
    Chen, Chih-Han
    Hong, Zhong-Jie
    Lin, Tai-Yu
    Hung, Ying-Chan
    Chen, Kuan-Neng
    IEEE ELECTRON DEVICE LETTERS, 2024, 45 (08) : 1500 - 1503