Angular and velocity distributions of tungsten sputtered by low energy argon ions

被引：16

作者：

Marenkov, E. ^{[1
]}

Nordlund, K. ^{[1
,2
]}

Sorokin, I. ^{[1
,4
]}

Eksaeva, A. ^{[1
,3
]}

Gutorov, K. ^{[1
]}

Jussila, J. ^{[2
]}

Granberg, F. ^{[2
]}

Borodin, D. ^{[3
]}

机构：

[1] Natl Res Nucl Univ MEPhI, Moscow Engn Phys Inst, Kashirskoe Shosse 31, Moscow 115409, Russia

[2] Univ Helsinki, Dept Phys, POB 43, FI-00014 Helsinki, Finland

[3] Forschungszentrum Julich, Inst Energie & Klimaforsch Plasmaphys, D-52425 Julich, Germany

[4] Russian Acad Sci, Fryazino Branch, Kotelnikov Inst Radio Engn & Elect, Pl Vedenskogo 1, Fryazino 141190, Moscow Oblast, Russia

来源：

JOURNAL OF NUCLEAR MATERIALS | 2017年 / 496卷

关键词：

MOLECULAR-DYNAMICS; HEAVY-IONS; SIMULATION; ATOMS;

D O I：

10.1016/j.jnucmat.2017.09.021

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Sputtering by ions with low near-threshold energies is investigated. Experiments and simulations are conducted for tungsten sputtering by low-energy, 85-200 eV Ar atoms. The angular distributions of sputtered particles are measured. A new method for molecular dynamics simulation of sputtering taking into account random crystallographic surface orientation is developed, and applied for the case under consideration. The simulations approximate experimental results well. At low energies the distributions acquire "butterfly-like" shape with lower sputtering yields for close to normal angles comparing to the cosine distribution. The energy distributions of sputtered particles were simulated. The Thompson distribution remains valid down to near-threshold 85 eV case. (C) 2017 Elsevier B. V. All rights reserved.

引用

页码：18 / 23

页数：6

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