Some results obtained by the Kharkov research group in the area of developing highly efficient methods of diamond coating deposition

被引:0
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作者
Aksenov, II
Belous, VA
Vasilev, VV
Strelnitskij, VE
Samokhvalov, NV
Opalev, AO
机构
来源
EURODIAMOND '96 | 1996年 / 52卷
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中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The synthesis of diamond in its metastable state from a carbon-containing gas at a subatmospheric pressure, and also by condensing beams of neutral atoms, ions or a plasma has been a subject of many investigations [1-4]. The methods considered ensure the production of diamond-like (DLC) and polycrystalline diamond (DC) coatings as continuous layers, and this essentially increases their practical value. The aim of this paper is to make review of the most important results in the field of developing high-efficient methods of DLC and DC deposition which were obtained by the Kharkov research group. First results in the field of deposition of the amorphous diamond in the form of films and coatings (DLC) with the use of vacuum-are discharge were obtained in the Kharkov Institute of Physics and Technology in the early of seventies simultaneously with S.Aisenberg. Regular publications appeared since 1976. The works in the field of diamond coating production began in 1992.
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页码:17 / 26
页数:10
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