Reliable determination of wavelength dependence of thin film refractive index

被引：7

作者：

Tikhonravov, A ^{[1
]}

Trubetskov, M ^{[1
]}

Amotchkina, T ^{[1
]}

Tikhonravov, A ^{[1
]}

Ristau, D ^{[1
]}

Günster, S ^{[1
]}

机构：

[1] Res Comp Ctr, Moscow 199992, Russia

来源：

ADVANCED CHARACTERIZATION TECHNIQUES FOR OPTICS, SEMICONDUCTORS, AND NANOTECHNOLOGIES | 2003年 / 5188卷

关键词：

thin films; optical characterization; refractive index;

D O I：

10.1117/12.505554

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Depending on the choice of thin film models and measurement data used for the characterization analysis one can obtain essentially different characterization results. It is especially difficult to reliably determine refractive index wavelength dependencies in the case of low accuracy measurement data. We consider possible approaches aimed to improve a stability of refractive index determination. The ways of the verification of characterization results are also discussed. Practical examples used to illustrate the proposed approaches are connected with the most difficult case of the determination of the refractive indices of fluoride films in the VUV spectral region.

引用

页码：331 / 342

页数：12

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