Nonlocal conductivity effects in low-pressure cylindrical inductive discharges

被引:4
|
作者
Kolev, St [1 ]
Shivarova, A. [1 ]
Tarnev, Kh [2 ]
机构
[1] Univ Sofia, Fac Phys, 5 J Bourchier Blvd, BG-1164 Sofia, Bulgaria
[2] Tech Univ Sofia, Dept Appl Phys, BG-1000 Sofia, Bulgaria
关键词
D O I
10.1088/1742-6596/63/1/012020
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The study is on nonlocal conductivity and stochastic heating in low-pressure inductive discharges with cylindrical coils. The rf current density derived by solving the Boltzmann equation in cylindrical coordinates, with accounting for both the high-frequency heating field and the dc field in the discharge, is coupled with the wave equation resulting into the spatial distribution - under the conditions of anomalous skin - of the electromagnetic field components, of the rf current density and the power deposition in the free-fall regime of maintenance of hydrogen discharges.
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页数:6
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