Nitrogen effect on the dust presence and behavior in a radio frequency CH4/N2 discharge

被引：16
|
作者：
Pereira, Jeremy [1 ]
Massereau-Guilbaud, Veronique [1 ]
Geraud-Grenier, Isabelle [1 ]
Plain, Andre [1 ]
机构：
[1] Univ Orleans, Fac Sci, LASEP, F-18028 Bourges, France
来源：
JOURNAL OF APPLIED PHYSICS | 2008年 / 103卷 / 03期
关键词：
D O I：
10.1063/1.2829782
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In this paper, we have studied the effects of the nitrogen percentage on particles generated in low pressure radio frequency CH4/N-2 discharges. The particle behavior has been analyzed by laser beam extinction and scattering. The nitrogen percentage in the mixture influences the particle presence, behavior, and size in the discharge. For nitrogen percentages greater than 50%, we have evidenced a particle multigeneration and oscillations in particle clouds. These oscillations have been correlated with the discharge electrical parameters. (c) 2008 American Institute of Physics.
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页数：9
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