Symmetrical SOI MESFET with a dual cavity region (DCR-SOI MESFET) to promote high-voltage and radio-frequency performances

被引:13
|
作者
Anvarifard, Mohammad K. [1 ]
机构
[1] Univ Guilan, East Guilan, Fac Engn & Technol, Dept Engn Sci, Rudsar Vajargah, Iran
关键词
breakdown voltage; p-type cavity region; Potential profile; SOI-MESFET; Radio-frequency; 4H-SIC MESFET; BREAKDOWN-VOLTAGE; DEVICE; TRANSISTORS; IMPROVEMENT; LAYER;
D O I
10.1016/j.spmi.2016.09.003
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
A novel symmetrical SOI-MESFET is reported to enhance high-voltage and radio-frequency performances, successfully. Two p-type cavity regions with certain features are embedded in the proposed structure to control the channel region. The cavity regions absorb the channel potential lines resulting in an evener potential profile throughout the channel region. Hence, the critical electric field at the end of gate edge near the drain will be considerably reduced thus increasing the breakdown voltage, finally. A comprehensive comparison in terms of breakdown voltage, radio-frequency parameters, drain-source conductance and minimum noise figure shows that the reported new device reaches a superior electrical performance when compared with a conventional SOI MESFET. (C) 2016 Elsevier Ltd. All rights reserved.
引用
收藏
页码:492 / 503
页数:12
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