Design and analysis of monolithic integrated MEMS vector hydrophone micro-array

Based on the high sensitivity and miniaturization advantages of MEMS vector hydrophone, we proposed and designed a monolithic integrated micro-array vector hydrophone composed of multiple sensor units. The theoretical model shows that the micro-array can improve the structural sensitivity and output signal-to-noise ratio while eliminating the problem of port and starboard ambiguity. Meanwhile, the micro-array structure clearly reduces the installation error of conventional vector array and improve the directional accuracy. Taking 5 element micro-array as an example, the resonance frequency in wet mode reaches 956 Hz that meets the requirement of test frequency band. Through theoretical and computational analysis, the sensitivity of micro array is increased 14 dB and the SNR is increased 3.1 dB compared with that of the single vector hydro phone. The standing-wave tube experiment verified the directional effect of vector micro-array. The research of vector hydrophone micro-array is helpful to the application of underwater acoustic engineering.