Efficient micro processing with high power femtosecond lasers by beam engineering and modelling

被引：9
|
作者：
Bernard, O. [1 ]
Audouard, E. [1 ]
Schops, B. [1 ]
Delaigue, M. [1 ]
Dalla-Barba, G. [1 ]
Mishchik, K. [1 ]
Honninger, C. [1 ]
Mottay, E. [1 ]
机构：
[1] Amplitude Syst, 11 Ave Canteranne, F-33600 Pessac, France
来源：
10TH CIRP CONFERENCE ON PHOTONIC TECHNOLOGIES [LANE 2018] | 2018年 / 74卷
关键词：
high power ultra fast lasers; femtosecond processing; beam shaping; femtosecond ablation modelling; MICROFABRICATION; ABLATION;
D O I：
10.1016/j.procir.2018.08.121
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Hybrid femtosecond lasers today deliver output powers of several hundred watts. Translating the available power into high-speed micromachining requires new approaches such as beam delivering tools with suitable synchronization of the laser pulses. We study the interest of rapid scanning systems or multi-beam shaping but also a rapid estimation of the ablation efficiency using a simple engineering model. (C) 2018 The Authors. Published by Elsevier Ltd.
引用
收藏
页码：310 / 314
页数：5
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