A NOVEL QUALITY FACTOR TRIMMING METHOD FOR MULTI-RING MEMS RESONATORS BASED ON THERMOELASTIC DISSIPATION

We report, for the first time, the experimental demonstration of quality factor (Q-factor) trimming based on thermoelastic dissipation (TED). The proposed method could control the heat path, eventually energy dissipation rate by TED. By the appropriate choice of the trimming location, it could tune the Q-factor of a mode, almost independent from the Q-factors of other modes as well as the resonant frequencies. A multi-ring resonator was designed and evaluated to demonstrate the Q-factor tuning of a n = 2 wine glass mode. The Q-factor difference could be trimmed as high as 19.43%, while the frequency difference changed was as small as 0.43%.