Temperature dependence of crystal size and nucleation density of diamond film

被引:0
|
作者
Uemura, H [1 ]
Yamamoto, H [1 ]
Inaoka, T [1 ]
Makita, H [1 ]
Naoi, Y [1 ]
Shintani, Y [1 ]
机构
[1] Univ Tokushima, Fac Engn, Tokushima 7708506, Japan
来源
DIAMOND FILMS AND TECHNOLOGY | 1998年 / 8卷 / 05期
关键词
nucleus size and nucleation density; temperature dependence; growth condition; heteroepitaxy; platinum substrate;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In the case of platinum substrates, azimuthal orientation and coalescence of diamond films depend on the size of the nucleus and the nucleation density. It was found that the size and density of diamond particles are significantly influenced by the substrate temperature during the early stage of synthesis. The results obtained here in the present experimental study indicate that both the size of the nucleus and the nucleation density should be controlled for the fabrication of heteroepitaxial diamond film on platinum.
引用
收藏
页码:339 / 346
页数:8
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