Design of automated experiment management system with applications to R&D and large volume semiconductor manufacturing

被引：0
|
作者：
Jun, KS [1 ]
Ellenberg, S [1 ]
Carlier, A [1 ]
Lee, YH [1 ]
机构：
[1] Appl Mat Inc, Santa Clara, CA 95054 USA
来源：
ISSM 2005: IEEE International Symposium on Semiconductor Manufacturing, Conference Proceedings | 2005年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper will explain the design methodology of automated experiment management systems applicable to both semiconductor R&D and manufacturing processes. The latest advanced R&D and high volume manufacturing sites require more flexibility modifying experimental processes with wafers. This is due to integrated and specific process design test needs without increasing cycle time and cost. The automated experiment management design method will be demonstrated by using a Manufacturing Execution System (MES), called Applied FAB300 (c).
引用
收藏
页码：315 / 318
页数：4
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