Platinum zone plates for hard X-ray applications

被引：11

作者：

Chubarova, E. ^{[1
]}

Nilsson, D. ^{[1
]}

Lindblom, M. ^{[1
]}

Reinspach, J. ^{[1
]}

Birch, J. ^{[2
]}

Vogt, U. ^{[1
]}

Hertz, H. M. ^{[1
]}

Holmberg, A. ^{[1
]}

机构：

[1] Royal Inst Technol KTH, Dept Appl Phys, SE-10691 Stockholm, Sweden

[2] Linkoping Univ, Dept Phys Chem & Biol, SE-58183 Linkoping, Sweden

来源：

MICROELECTRONIC ENGINEERING | 2011年 / 88卷 / 10期

关键词：

Zone plate; Pt electroplating; X-ray optics; Electron beam lithography; FABRICATION;

D O I：

10.1016/j.mee.2011.06.011

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We describe the fabrication and evaluation of platinum zone plates for 5-12 kV X-ray imaging and focusing. These nano-scale circular periodic structures are fabricated by filling an e-beam generated mold with Pt in an electroplating process. The plating recipe is described. The resulting zone plates, having outer zone widths of 100 and 50 nm, show good uniformity and high aspect ratio. Their diffraction efficiencies are 50-70% of the theoretical, as measured at the European Synchrotron Radiation Facility. Platinum shows promise to become an attractive alternative to present hard X-ray zone plate materials due to its nano-structuring properties and the potential for zone-plate operation at higher temperatures. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：3123 / 3126

页数：4

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