In this paper, a new type of single-mode embedded dye-doped electro-optic (EO) polymeric waveguide switch based on cross-linkable negative photoresist was successfully designed and fabricated using direct photodefinition technique. The optical properties of the UV cross-linkable poled polymer were characterized. By optimizing the poling temperature and the dopant levels of Disperse Red 1, the DR1/SU-8 material showed excellent photostability and exhibited an EO coefficient, gamma(33), of 25 pm/V. The characteristic parameters of both the waveguide and the electrode were carefully designed and simulated by MATLAB program. The Mach-Zehnder interferometer switch on-off time obtained was about 6 mu s. The new fabrication technique is a simple, rapid, and controllable process. The easy-to-fabricate waveguide structure is suitable for planar active lightwave circuit applications. The dye-doped polymer photosensitive waveguide devices will be very useful in realizing EO modulators and switches.
机构:
Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
Gao, Yonghao
Huang, Xinnan
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Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
Huang, Xinnan
Xu, Xingsheng
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Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
机构:
Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R ChinaChinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
Zhao, Dong
Liu, Liren
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Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R ChinaChinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
Liu, Liren
Wang, Jiming
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Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R ChinaChinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
Wang, Jiming
Lang, Haltao
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Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R ChinaChinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
Lang, Haltao
Pan, Weiqing
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Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R ChinaChinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
机构:
State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin UniversityState Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University
Yan X.
Ma C.-S.
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State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin UniversityState Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University
Ma C.-S.
Wang X.-Y.
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State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin UniversityState Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University
Wang X.-Y.
Zhang D.-M.
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State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin UniversityState Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University
Zhang D.-M.
Liu S.-Y.
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State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin UniversityState Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University