Laser Micromilling Technology as a Key for Rapid Ceramic MEMS Devices

被引：2
|
作者：
Oblov, K. Yu. [1 ]
Samotaev, N. N. [1 ]
Etrekova, M. O. [1 ]
Gorshkova, A. V. [1 ]
机构：
[1] Natl Res Nucl Univ MEPhI, Moscow Engn Phys Inst, Moscow 115409, Russia
来源：
PHYSICS OF ATOMIC NUCLEI | 2019年 / 82卷 / 11期
关键词：
microelectromechanical systems; ceramics; surface mount device; laser micromilling; GAS SENSORS; SEMICONDUCTOR;
D O I：
10.1134/S1063778819110152
中图分类号：
O57 [原子核物理学、高能物理学];
学科分类号：
070202 ;
摘要：
The flexible laser micromilling technology for ceramic MEMS production of microhotplates in the surface mount device (SMD) package is described. Current results demonstrate that using described technology makes it possible to manufacture all parts of MEMS sensor in the SMD with form factor of SOT-23 package type.
引用
收藏
页码：1508 / 1512
页数：5
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