Fabrication of waveguides in Yb:YCOB crystal by MeV oxygen ion implantation

被引:1
|
作者
Jiao, Yang [1 ]
Chen, Feng
Wang, Xue-Lin
Wang, Ke-Ming
Wang, Lei
Wang, Liang-Ling
Zhang, Huai-Jin
Lu, Qing-Ming
Ma, Hong-Ji
Nie, Rui
机构
[1] Shandong Univ, Sch Phys & Microelect, Jinan 250100, Peoples R China
[2] Shandong Univ, State Key Lab Crystal Mat, Jinan 250100, Peoples R China
[3] Shandong Univ, Sch Chem & Chem Engn, Jinan 250100, Peoples R China
[4] Peking Univ, Minist Educ, Key Lab Heavy Ion Phys, Beijing 100871, Peoples R China
基金
中国国家自然科学基金;
关键词
ion implantation; optical waveguide; Yb : YCOB crystal;
D O I
10.1016/j.apsusc.2007.03.021
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Oxygen ions with energies of 6.0 or 3.0 MeV were implanted into y-cut Yb:YCOB crystals at fluences ranging from 5.0 x 10(13) to 2.0 x 10(15) ions/cm(2) at room temperature, forming optical planar waveguide structures. Dark-mode line spectroscopy was applied at two wavelengths, 633 and 1539 nm, in various excitation configurations, showing strong enhancement of one of the indices (n(x)) in the implanted near surface. The n(x) refractive index profile is reconstructed by a reflectivity calculation method and compared to the ion energy losses profiles deduced from SRIM-code simulation. Moreover, the near-field patterns were imaged by an end-fire coupling arrangement. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:7360 / 7364
页数:5
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