SECS-GEM for Y2K testing in fabs

被引：0

作者：

Ghiselli, J ^{[1
]}

Saso, C ^{[1
]}

机构：

[1] GW Associates Inc, Sunnyvale, CA 94089 USA

来源：

SOLID STATE TECHNOLOGY | 1998年 / 41卷 / 12期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Potential "year 2000" problems have reached almost mythical proportions. Unfortunately, they have generated excessive studies and pontification. The solution, particularly for semiconductor wafer fabs, involves rolling up our sleeves and fixing the problem.

引用

页码：71 / +

页数：4

共 50 条

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