Half-coaxial-like transmission line using benzo cyclo butene layer

被引:1
|
作者
Kim, J. -M. [1 ]
Cheon, C. [2 ]
Kwon, Y. [3 ]
Kim, Y. -K. [3 ]
机构
[1] Chonbuk Natl Univ, Div Elect & Informat Engn, Coll Engn, Jeonju, South Korea
[2] Univ Seoul, Dept Elect & Comp Engn, Seoul, South Korea
[3] Seoul Natl Univ, Sch Elect Engn & Comp Sci, Seoul, South Korea
关键词
D O I
10.1049/el:20080973
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A simple and successful design for a half-coaxial-like transmission line using benzo cyclo butene (BCB) is presented. The proposed half-coaxial transmission line was fabricated using a conventional surface micromachining without additional removal of the sacrificial layer. The measured half-coaxial transmission line showed less than 1 dB/cm loss at 20 GHz. Simulated results using CPW modelling are compared with measured data and good agreement is reported.
引用
收藏
页码:810 / 811
页数:2
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