Precise electron beam-based target-wavelength trimming for frequency conversion in integrated photonic resonators

被引：16
|
作者：
Thiel, Lillian [1 ]
Logan, Alan D. [1 ]
Chakravarthi, Srivatsa [1 ]
Shree, Shivangi [2 ]
Hestroffer, Karine [3 ]
Hatami, Fariba [3 ]
Fu, Kai-Mei C. [1 ,2 ]
机构：
[1] Univ Washington, Dept Elect & Comp Engn, Seattle, WA 98195 USA
[2] Univ Washington, Dept Phys, Seattle, WA 98195 USA
[3] Humboldt Univ, Dept Phys, D-12489 Berlin, Germany
来源：
OPTICS EXPRESS | 2022年 / 30卷 / 05期
基金：
美国国家科学基金会;
关键词：
HYDROGEN SILSESQUIOXANE; 2ND-HARMONIC GENERATION; RING-RESONATORS; SILICON; EFFICIENCY; COMPACT; FILMS;
D O I：
10.1364/OE.446244
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We demonstrate post-fabrication target-wavelength trimming with a gallium phosphide on a silicon nitride integrated photonic platform using controlled electron-beam exposure of hydrogen silsesquioxane cladding. A linear relationship between the electron-beam exposure dose and resonant wavelength red-shift enables deterministic, individual trimming of multiple devices on the same chip to within 30 pm of a single target wavelength. Second harmonic generation from telecom to near infrared at a target wavelength is shown in multiple devices with quality factors on the order of 10(4). Post-fabrication tuning is an essential tool for targeted wavelength applications including quantum frequency conversion. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
引用
收藏
页码：6921 / 6933
页数：13
相关论文
共 10 条
  • [1] Microwave Photonic Frequency Conversion Based on a Wavelength Swept Laser
    Kong, Youxue
    Cao, Yuan
    Wang, Lin
    Wang, Guangying
    Feng, Xinhuan
    Guan, Bai-Ou
    APPLIED SCIENCES-BASEL, 2020, 10 (11):
  • [2] Photonic integrated circuits based hybrid integration for wavelength beam combining
    Zeng, Siwei
    Zhao, Xiaolei
    Sweatt, Lance
    Zhu, Lin
    OPTICS LETTERS, 2020, 45 (22) : 6338 - 6341
  • [3] 56 Gb/s All-Optical Wavelength Conversion based on a Photonic Integrated Turbo-Switch
    Hajomer, A. A. E.
    Bontempi, F.
    Andriolli, N.
    Porzi, C.
    Hu, W.
    Yang, X.
    Contestabile, G.
    2019 24TH OPTOELECTRONICS AND COMMUNICATIONS CONFERENCE (OECC) AND 2019 INTERNATIONAL CONFERENCE ON PHOTONICS IN SWITCHING AND COMPUTING (PSC), 2019,
  • [4] Efficient and wavelength-tunable anti-Stokes frequency conversion with good beam quality in the fundamental mode of photonic crystal fiber
    Yuan, J. -H.
    Sang, X. -Z.
    Yu, C. -X.
    Rao, L.
    Han, Y.
    Zhou, G. -Y.
    Li, S. -G.
    Hou, L. -T.
    APPLIED PHYSICS B-LASERS AND OPTICS, 2011, 105 (04): : 685 - 688
  • [5] Efficient and wavelength-tunable anti-Stokes frequency conversion with good beam quality in the fundamental mode of photonic crystal fiber
    J.-H. Yuan
    X.-Z. Sang
    C.-X. Yu
    L. Rao
    Y. Han
    G.-Y. Zhou
    S.-G. Li
    L.-T. Hou
    Applied Physics B, 2011, 105 : 685 - 688
  • [6] A New Marking Technique for the Site-Specific Target in Focused Ion Beam-Based Transmission Electron Microscopy Thin Foil Preparation
    Lee, Sungho
    Kang, Jonghyuk
    Yang, Cheol-Woong
    SCIENCE OF ADVANCED MATERIALS, 2015, 7 (08) : 1492 - 1496
  • [7] Ka-band to L-band frequency down-conversion based on III–V-on-silicon photonic integrated circuits
    Van Gasse K.
    Wang Z.
    Uvin S.
    De Deckere B.
    Mariën J.
    Thomassen L.
    Roelkens G.
    Van Gasse, K. (kasper.vangasse@ugent.be), 1600, Springer-Verlag Wien (09): : 531 - 541
  • [8] 1.5-μm-band wavelength conversion based on difference-frequency generation in LiNbO3 waveguides with integrated coupling structures
    Chou, MH
    Hauden, J
    Arbore, MA
    Fejer, MM
    OPTICS LETTERS, 1998, 23 (13) : 1004 - 1006
  • [9] Improving the Signal-to-Noise Ratio of Photonic Frequency Conversion from 852 nm to 1560 nm Based on a Long-Wavelength Laser-Pumped PPLN Waveguide Module
    Guo, Miao
    Zhang, Kong
    Zhang, Yunhao
    He, Jun
    Wang, Junmin
    PHOTONICS, 2022, 9 (12)
  • [10] Photonic sampling analog-to-digital conversion based on time and wavelength interleaved ultra-short optical pulse train generated by using monolithic integrated LNOI intensity and phase modulator
    Li, Zhengkai
    Wang, Xuanhao
    Zhang, Yujia
    Shang, Chenglin
    Lyu, Weiqiang
    Lyu, Yanjia
    Zeng, Cheng
    Zhang, Zhiyao
    Zhang, Shangjian
    Li, Heping
    Xia, Jinsong
    Liu, Yong
    OPTICS EXPRESS, 2022, 30 (16) : 29611 - 29620
1