Design of a linear switched reluctance motor for high precision applications

This paper describes the design of a linear switched reluctance motor (LSRM) for high-speed high-precision point-to-point motions. An S-shaped curve is first chosen as the trajectory motion profile and then a simple yet effective design procedure is introduced to design the motor's mechanical dimensions. Theoretical deduction and experimental results on the phase inductance and the static force generation are presented and compared with each other. The final design has a simple and robust structure. Measurements from the fabricated LSRM show that the motor has met all design specifications. The resultant LSRM is very useful in high-precision applications, especially in semiconductor fabrication machineries.