Mercury vapor detection with a self-sensing, resonating piezoelectric cantilever

被引:79
|
作者
Rogers, B [1 ]
Manning, L
Jones, M
Sulchek, T
Murray, K
Beneschott, B
Adams, JD
Hu, Z
Thundat, T
Cavazos, H
Minne, SC
机构
[1] Univ Nevada, Dept Mech Engn, Reno, NV 89557 USA
[2] Univ Nevada, Nevada Ventures Nanosci Program, Reno, NV 89557 USA
[3] Oak Ridge Natl Lab, Oak Ridge, TN 37831 USA
[4] Nanodevices Inc, Santa Barbara, CA 93111 USA
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2003年 / 74卷 / 11期
关键词
D O I
10.1063/1.1614876
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A microcantilever with an integrated piezoelectric film is demonstrated as a mercury vapor detector. The cantilever is self-sensing and self-actuating, and therefore does not need alignment of an external, optical detection system. This gives the new sensor system an advantage in array applications. Mercury vapor, when adsorbed onto gold on the cantilever, causes the stiffness, and therefore the natural frequency, of the cantilever to increase as a result of mercury gold amalgamation. This shift is detected using the piezoelectric portion of the cantilever in conjunction with a bridge circuit and amplifier. A mercury concentration of 93 ppb in nitrogen is detected. (C) 2003 American Institute of Physics.
引用
收藏
页码:4899 / 4901
页数:3
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