Fly height measurement based on phase comparison Michelson interferometry using, low-coherence light source

被引：2

作者：

He, Yinbo ^{[2
]}

Zhang, Hedong ^{[1
]}

Fukuzawa, Kenji ^{[2
]}

Mitsuya, Yasunaga ^{[2
]}

机构：

[1] Nagoya Univ, Grad Sch Informat Sci, Dept Complex Syst Sci, Nagoya, Aichi 4648601, Japan

[2] Nagoya Univ, Grad Sch Engn, Dept Micronano Syst Engn, Nagoya, Aichi 4648603, Japan

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2008年 / 44卷 / 02期

关键词：

flying head slider; head fly height; low-coherence light illumination; Michelson interferometry;

D O I：

10.1109/TMAG.2007.911856

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a method for measuring head fly height in hard disk drives using phase comparison Michelson interferometry (PCMI), which compares the phases of two interference fringe patterns formed respectively on the inner surface of a glass disk and the air-bearing surface of a fly head slider through the glass disk. To suppress interference noise and further enhance measurement accuracy, we adopted a low-coherence light source as an illumination source to replace a high-coherence laser. The captured fringe images enabled us to extract ridge lines much more accurately than with a laser. We compared our measurements in the sub-10 nm spacing range with calculations and found excellent agreement.

引用

页码：309 / 314

页数：6

共 50 条

[1] PMD MEASUREMENTS BASED ON LOW-COHERENCE INTERFEROMETRY USING A MICHELSON INTERFEROMETER
Amaral, Luis M. N.
Pereira, D. A.
Frazao, O.
Marques, M. B.
Lima, M. J. N.
Teixeira, A. L. J.
[J]. MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2010, 52 (10) : 2310 - 2312
[2] Light source for low-coherence interferometry and imaging
Sverdlov, MI
Akchurin, GG
Alaverdyan, SA
Andrushkevich, TA
Zimnyakov, DA
Kuznetsova, OA
Mishin, AA
Mikaelyan, GT
Sokolov, SN
Stepuhovich, AV
Tuchin, VV
[J]. COHERENCE DOMAIN OPTICAL METHODS IN BIOMEDICAL SCIENCE AND CLINICAL APPLICATIONS II, PROCEEDINGS OF, 1998, 3251 : 273 - 277
[3] Refractive index measurements using a Michelson interferometer with a low-coherence light source
Caudill, SE
Grubbs, WT
[J]. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2005, 229 : U459 - U459
[4] Light source for low-coherence interferometry surface diagnostics
Buchta, Zdenek
Mikel, Bretislav
Rerucha, Simon
Lazar, Josef
Cip, Ondrej
[J]. INTERNATIONAL CONFERENCE ON APPLICATIONS OF OPTICS AND PHOTONICS, 2011, 8001
[5] Measurement of Faraday rotation using phase-sensitive low-coherence interferometry
Al-Qaisi, Muhammad K.
Wang, Hui
Akkin, Taner
[J]. APPLIED OPTICS, 2009, 48 (30) : 5829 - 5833
[6] New measurement technique for dispersion characterizing optical fibers using low-coherence spectral interferometry with a Michelson interferometer
Hlubina, P
[J]. INTERFEROMETRY '99: TECHNIQUES AND TECHNOLOGIES, 1999, 3744 : 404 - 414
[7] Needle-based refractive index measurement using low-coherence interferometry
Zysk, Adam M.
Adie, Steven G.
Armstrong, Julian J.
Leigh, Matthew S.
Paduch, Alexandre
Sampson, David D.
Nguyen, Freddy T.
Boppart, Stephen A.
[J]. OPTICS LETTERS, 2007, 32 (04) : 385 - 387
[8] Semiconductor line source for low-coherence interferometry
Zvyagin, AV
Garcia-Webb, MG
Sampson, DD
[J]. APPLIED OPTICS, 2001, 40 (06) : 913 - 915
[9] Angular light scattering studies using low-coherence interferometry
Wax, A
Yang, CH
Dasari, RR
Feld, MS
[J]. COHERENCE DOMAIN OPTICAL METHODS IN BIOMEDICAL SCIENCE AND CLINICA APPLICATIONS V, 2001, 4251 : 32 - 42
[10] Air refractive index measurement using low-coherence interferometry
Pikalek, Tomas
Buchta, Zdenek
[J]. APPLIED OPTICS, 2015, 54 (16) : 5024 - 5030

← 1 2 3 4 5 →