Optical metrology for DMD™ characterization

The Digital Micromirror Device (TM) (DMD (TM)) developed at Texas Instruments is a spatial light modulator composed of 500,000 to 1.3 million movable micromachined aluminum mirrors. The DMD (TM) serves as the engine for the current generation of computer-driven slide and video projectors, and for next generation devices in digital television and movie projectors. Because of the unique architecture and applications of the device, Texas Instruments has developed a series of customized optical testers for characterizing DMD (TM) performance. This paper provides a general overview of the MirrorMaster, a custom optical inspection tool. Particular attention is given to Bias Adhesion Mapping (BAM) as a device performance metric. BAM is an optical test that monitors the performance of the mirrors as a function of an applied voltage. This voltage drives the mirrors to the 'on' or 'off' position, and as the bias is stepped down the mirrors return to their neutral orientations. Important forces involved in this process include the electrostatic field applied, the compliance of the hinge, and static friction (stiction). BAM curves can help characterize device stiction and allow us to examine the efficacy of the lubrication system over the lifetime of the device.