Effects of technological parameters on microstructure and properties of CrAlN coating deposited by DC magnetron sputtering

被引：0

作者：

Yang Lihong ^{[1
]}

Zheng Kangpei ^{[1
]}

Liu Ping ^{[2
]}

Li Wei ^{[2
]}

机构：

[1] Univ Shanghai Sci & Technol, Sch Mech Engn, Shanghai 200093, Peoples R China

[2] Univ Shanghai Sci & Technol, Sch Mat Sci & Engn, Shanghai 200093, Peoples R China

来源：

FOURTH INTERNATIONAL SEMINAR ON MODERN CUTTING AND MEASUREMENT ENGINEERING | 2011年 / 7997卷

关键词：

CrAlN coating; magnetron sputtering; technological parameters; HARDNESS;

D O I：

10.1117/12.888040

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

In this paper, the deposition processes of CrAlN coatings on high speed steel (M2) substrate was mainly researched, which made by reactive direct current (DC) magnetron sputtering with AlCr alloy target. The effects of technological parameters (Ar/N-2 flow ratio, gas pressure and substrate temperature) on the microstructure and properties of CrAlN coatings were systematically studied with scanning electron microscopy (SEM), X-ray diffraction (XRD), energy dispersive spectrum (EDS) and nano-indentation techniques. The results indicated that Ar/N-2 flow rate, gas pressure and substrate temperature greatly influenced the microstructure and properties of CrAlN coatings. With Ar/N-2 flow ratio of 1, gas pressure of 0.2Pa and substrate temperature of 300 degrees C, the hardness and elastic modulus of CrAlN coating were 34.8GPa and 434.3GPa respectively.

引用

页数：8

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