Effect of film thickness on liquefied petroleum gas (LPG) sensing properties of SILAR deposited CdO thin films

被引:121
|
作者
Salunkhe, R. R. [1 ]
Lokhande, C. D. [1 ]
机构
[1] Shivaji Univ, Dept Phys, Thin Film Phys Lab, Kolhapur 416004, Maharashtra, India
来源
SENSORS AND ACTUATORS B-CHEMICAL | 2008年 / 129卷 / 01期
关键词
cadmium oxide; LPG sensor; SILAR;
D O I
10.1016/j.snb.2007.08.035
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Nanocrystalline cadmium oxide (CdO) thin films of different thicknesses were deposited on a glass substrate by a simple chemical method (successive ionic layer adsorption and reaction, SILAR) based on alternate dipping of the substrate in an alkaline cadmium nitrate solution and double-distilled water containing 1% H2O2, followed by air heat treatment at 723 K for 5 h. The cadmium oxide thin films were used as sensing layers for liquefied petroleum (LPG) resistive gas sensors. These samples were structurally and morphologically characterized using X-ray diffraction and SEM techniques, respectively. The dependence of LPG sensing properties on the thickness of CdO thin film was investigated. Maximum gas response achieved was 18.75% for the film of thickness 1.5 mu m at a fixed gas concentration of 0.08 vol% at 698 K. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:345 / 351
页数:7
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