Micro milling technologies for MEMS

In this paper, a comprehensive introduction comprehensive introduction of micro milling principles of micro milling technology, which is a novel research. Knowing the micro milling principles clearly is very micro-manufactu ring technology to fabricate many materials with complex 3D and high aspect ratio structure, pivotal to decide the micro milling parameters and fabricate is presented. Compared with some other dedicate MENIS devices. In the fourth part, our research micro-manufactu ring technologies, micro milling has a lot of merits, such as low cost, flexibility. The machine tool, nowadays about the micro milling principles research is given. micro mills, and monitoring devices are the key technologies, and the micro milling principles with. attention to minimum chip thickness and workpiece microstructure influences are presented primarily. At last, our research in micro milling field is given.