Realization of an ultracompact low-loss photonic crystal corner mirror

被引:2
|
作者
Yu, Hejun [1 ]
Yu, Jinzhong [1 ]
Fan, Zhongchao [1 ]
Chen, Shaowu [1 ]
机构
[1] Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
基金
中国国家自然科学基金;
关键词
corner mirror; photonic crystal (PC); silicon-on-insulator (SOI);
D O I
10.1109/LPT.2007.899459
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on the realization and characterization of an ultracompact, low-loss, and broadband corner mirror based on photonic crystals (PCs). By modifying the boundary layers of the PC region, extra losses of 1.1 +/- 0.4 dB per corner mirror are achieved for transverse-electronic polarization for silicon-on-insulator ridge waveguides fabricated by electron beam lithography and inductively coupled plasma etching. Dimensions of the PC corner mirror are less than 7 x 7 mu m(2), which are only about one tenth of conventional waveguide corner mirrors.
引用
收藏
页码:1042 / 1044
页数:3
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