A novel method for acquiring large-scale automated scanning electron microscope data

被引：20
|
作者：
Shiveley, A. R. [1 ,2 ]
Shade, P. A. [1 ,2 ]
Pilchak, A. L. [1 ,2 ]
Tiley, J. S. [1 ]
Kerns, R. [3 ]
机构：
[1] USAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH USA
[2] Universal Technol Corp, Dayton, OH USA
[3] UES Inc, Dayton, OH USA
来源：
JOURNAL OF MICROSCOPY | 2011年 / 244卷 / 02期
关键词：
EBSD; electron backscatter diffraction; microstructure; SEM; scanning electron microscope; texture; WORKING;
D O I：
10.1111/j.1365-2818.2011.03524.x
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
Recent software and hardware advances in the field of electron backscatter diffraction have led to an increase in the rate of data acquisition. Combining automated stage movements with conventional beam control have allowed researchers to collect data from significantly larger areas of samples than was previously possible. This paper describes a Lab VIEW (TM) and AutoIT (c) code which allows for increased flexibility compared to commercially available software. The source code for this software has been made available in the online version of this paper.
引用
收藏
页码：181 / 186
页数：6
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