Piezoresistive Cantilever Platform for Label-free Detection of Molecules

MEMS sensors can be used for label-free detection in many different biological studies. Usually in this procedure the presence of special substance in a sample can be monitored based on its interaction and binding with specific probe molecules which are immobilized on a sensor. These interactions will result into variations which can be detected by biosensors. Developing a low cost, high throughput system for performing label-free detection can be beneficial for different studies. This type of platform can be used for real-time detection of multiple molecules with high sensitivity. As a first step towards developing such platform, in this paper we present a label-free detection system using an array of 30 cantilevers implemented through standard MEMS foundry process (MetalMUMPs). Herein, we discuss the design, fabrication, and characterization results of the proposed platform using electrical and interferometry techniques. The results from simulations have shown that sensors can be used for measuring small forces in range of nN and pN and the characterization tests have proven that sensors are functional and they are ready to be used in biological experiments.