Boron carbon nitride based metal-insulator-metal UV detectors for harsh environment applications

被引：26
|
作者：
Prakash, Adithya [1 ]
Nehate, Shraddha D. [1 ]
Sundaram, Kalpathy B. [1 ]
机构：
[1] Univ Cent Florida, Dept Elect & Comp Engn, Orlando, FL 32816 USA
来源：
OPTICS LETTERS | 2016年 / 41卷 / 18期
关键词：
BCN THIN-FILMS; DIELECTRIC-CONSTANT; SEMICONDUCTOR; DEPOSITION;
D O I：
10.1364/OL.41.004249
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A metal-insulator-metal (MIM) structure using boron carbon nitride (BCN) was tested for its UV detection capability. Since BCN is one of the hardest and chemically robust materials, it is expected to be a potential choice for a UV detector in extreme and harsh conditions. The BCN thin films were deposited using a dual target RF magnetron sputtering process. The optoelectronic performance of the BCN MIM devices were examined through UV photocurrent measurements. A UV photocurrent of two orders of magnitude higher with respect to dark current was achieved in the range of -3 to 3 V. (C) 2016 Optical Society of America
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收藏
页码：4249 / 4252
页数：4
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