Computational studies on the effects of sheath in ion source plasmas

被引：0
|
作者：
Ido, S
Nakajima, Y
机构：
来源：
ICPP 96 CONTRIBUTED PAPERS - PROCEEDINGS OF THE 1996 INTERNATIONAL CONFERENCE ON PLASMA PHYSICS, VOLS 1 AND 2 | 1997年
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Three-dimensional particle orbit simulation has been applied in the bucket-type ion source to analyze plasma distribution. In this simulation the collsion model between neutral gas particles and electrons is considered, and the collision type is ionization, excitation and eastic. This paper introduces the sheath near the cathode and the anode, in which the influence of the sheath for the electron behavior is analyzed.
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页码：1358 / 1361
页数：4
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