Micro-scale opto-thermo-mechanical actuation in the dry adhesive regime

被引:15
|
作者
Tang, Weiwei [1 ,2 ]
Lyu, Wei [1 ,2 ]
Lu, Jinsheng [3 ]
Liu, Fengjiang [1 ,2 ]
Wang, Jiyong [1 ,2 ]
Yan, Wei [1 ,2 ]
Qiu, Min [1 ,2 ]
机构
[1] Westlake Univ, Sch Engn, Key Lab 3D Micro Nano Fabricat & Characterizat Zh, 18 Shilongshan Rd, Hangzhou 310024, Zhejiang, Peoples R China
[2] Westlake Inst Adv Study, Inst Adv Technol, 18 Shilongshan Rd, Hangzhou 310024, Zhejiang, Peoples R China
[3] Zhejiang Univ, Coll Opt Sci & Engn, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Peoples R China
基金
中国国家自然科学基金; 中国博士后科学基金;
关键词
MEMS; FABRICATION;
D O I
10.1038/s41377-021-00622-6
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Realizing optical manipulation of microscopic objects is crucial in the research fields of life science, condensed matter physics, and physical chemistry. In non-liquid environments, this task is commonly regarded as difficult due to strong adhesive surface force (similar to mu N) attached to solid interfaces that makes tiny optical driven force (similar to pN) insignificant. Here, by recognizing the microscopic interaction mechanism between friction force the parallel component of surface force on a contact surface and thermoelastic waves induced by pulsed optical absorption, we establish a general principle enabling the actuation of micro-objects on dry frictional surfaces based on the opto-thermo-mechanical effects. Theoretically, we predict that nanosecond pulsed optical absorption with mW-scale peak power is sufficient to tame mu N-scale friction force. Experimentally, we demonstrate the two-dimensional spiral motion of gold plates on micro-fibers driven by nanosecond laser pulses, and reveal the rules of motion control. Our results pave the way for the future development of micro-scale actuators in non-liquid environments.
引用
收藏
页数:10
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