Miniaturization of high-frequency carrier-type thin-film magnetic field sensor using laminated film

被引:9
|
作者
Takezawa, M
Kikuchi, H
Yamaguchi, M
Arai, KI
机构
[1] Kyushu Inst Technol, Fac Engn, Dept Elect Engn, Tobata Ku, Kitakyushu, Fukuoka 8048550, Japan
[2] Tohoku Univ, Res Inst Elect Commun, Aoba Ku, Sendai, Miyagi 9808577, Japan
关键词
demagnetizing field; domain structure; high-frequency carrier-type magnetic field sensor; lamination; magnetic anisotropy;
D O I
10.1109/20.908934
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We examined a laminated high-frequency carrier-type thin-film magnetic field sensor that consists of CoNbZr soft magnetic films with Nh nonmagnetic conductive interlayer. The lamination can change domain structure of the sensor and obtain high sensitivity. An impedance change of 6 Omega and a gain of 43 k Omega /T was achieved when the length of the laminated sensor was 1 mm. The gain is four times larger than that of a monolayer sensor.
引用
收藏
页码:3664 / 3666
页数:3
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