FABRICATION AND CHARACTERIZATION OF SILICON MICRO MIRROR WITH CNT HINGE

被引：0
|
作者：
Tung, B. T. [1 ]
Dau, V. T. [1 ]
Dao, D. V. [1 ]
Yamada, T.
Hata, K.
Sugiyama, S. [1 ]
机构：
[1] Ritsumeikan Univ, Kyoto, Japan
来源：
2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2011年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports the fabrication and characterization results of a silicon micro mirror fabricated by integrated of top-down fabrication of CNTs thin film and conventional micromachining. The silicon mirror is suspended by CNT hinge and actuated by using electrostatic force through angular vertical comb system. The performance of the mirror had been characterized. Thanks to the excellent mechanical properties of CNTs, the mirror could be driven by low voltage, i.e. less than 5 V, and response frequency up to 500 Hz
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页码：688 / 691
页数：4
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